Session Index

Thin-Film Technology and Optical Engineering

Thin-Film Technology and Optical Engineering I
Thursday, Dec. 3, 2020  13:15-14:45
Presider: Prof. Chien-Jen Tang
Prof. Che-Chin Chen
Room: 6AB Harvard Lecture Hall
13:15 - 13:45 Manuscript ID.  0821
Paper No.  2020-THU-S1001-I001
Invited Speaker:
Wei Ting Chen

Dispersion-engineered TiO2 metasurfaces
Wei Ting Chen

Optical dispersion results from the index of refraction of a material varying with the frequency of incident light. Accurate control over this property is vital. For example, it mitigates pulse spreading in optical fibers, which are the backbone of modern telecommunications, and enables pulse compression in ultrafast laser optics (2018 Nobel Prize in Physics). In this talk, I will begin with an introduction to the design, simulation, and fabrication of metasurface components with a focus on metalenses. Subsequently, I will illustrate how to control metasurface dispersion by customizing the group delay and group delay dispersion of constituent nanostructures. Such dispersion-engineered metasurfaces enable achromatic metalenses, aberration-corrected spectrometers, as well as lens-aberration correctors designed for simple singlets to complicated microscope objectives. My talk will be summarized by detailing on-going works involving metasurface-enabled superachromatic and broadband high-efficiency lenses and pointing out future emerging applications. These demonstrations are vastly applicable to machine vision, autonomous vehicles, optical communication, augmented and virtual reality devices, and more.

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13:45 - 14:00 Manuscript ID.  0279
Paper No.  2020-THU-S1001-O001
Award Candidate
Influence of Chip Sizes on Composite Metal Substrate for Thin film AlGaInP Micro LEDs

Investigated the performance of N-side up thin-epilayer, AlGaInP based vertical micro light-emitting diodes (VLEDs) with different chip sizes on composite metal (copper/Invar/copper; CIC) substrate were fabricated. The obtained data suggested that μ-LEDs with CIC substrate could be extended instead of conventional vertical electrodes for thin-film micro LEDs applications

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14:00 - 14:15 Manuscript ID.  0165
Paper No.  2020-THU-S1001-O002
You-Jia Zhang
Award Candidate
Ultraviolet GaN Photodiode with an Embedded Distributed Bragg Reflector
You-Jia Zhang

GaN-based photodiode embedded with porous-AlGaN distributed Bragg reflectors was demonstrated. High refractive index n+-AlGaN:Si epitaxial layers were transformed into low refractive index porous-AlGaN layers in the n+-AlGaN/n-AlGaN:Si stack structure through electrochemical etching process. Photocurrent and efficiency of GaN photodiode with porous DBR structure was increased due to light recycling process.

14:15 - 14:30 Manuscript ID.  0213
Paper No.  2020-THU-S1001-O003
Yun-Sheng Liu
Award Candidate
Nickel Silicide-Based Active Optical Antennas for Photodetection at Telecommunication Wavelengths
Yun-Sheng Liu

A complementary metal-oxide-semiconductor (CMOS)-compatible active antenna based on embedded inverse deep trench (EIDT) nickel silicide (NiSi) film based antenna structure, is demonstrated.These EIDT NiSi antennas take advantage of intrinsic loss of NiSi film, surface plasmon resonance phenomenon and three-dimensional cavity effect to provide efficient and polarization-insensitive absorption at telecommunication wavelengths.

14:30 - 14:45 Manuscript ID.  0341
Paper No.  2020-THU-S1001-O004
Chih-Chia Su
Award Candidate
Investigation and Fabrication of Collagen Thin Film Non-Volatile Resistive Memory Devices
Chih-Chia Su;Chen-Ban Jhang;Hsin-Chieh Yu

This study investigated the use of collagen materials to fabricate resistive-switching memory devices with ITO/Collagen/Al structure. The devices demonstrated decent operation characteristics including ON/OFF ration >10^3,data retention time exceeded 10^4 seconds, SET/RESET voltage of -0.92V and 0.5V, respectively, and switching cycles of about 168 times.


Thin-Film Technology and Optical Engineering

Thin-Film Technology and Optical Engineering II
Thursday, Dec. 3, 2020  16:20-17:50
Presider: Prof. His-Chao Chen
Prof. Chia-Feng Lin
Room: 6AB Harvard Lecture Hall
16:20 - 16:50 Manuscript ID.  0806
Paper No.  2020-THU-S1002-I001
Invited Speaker:
Che-Chin Chen

Three dimensional optical metamaterials and advanced optical components at TIRI
Che-Chin Chen;Fong-Yi Chen;Ching-Hsiang Kuo;Ming-Fu Chen;Chien-Nan Hsiao;Fong-Zhi Chen

We present our recent progress in developing three dimensional metamaterials which are fabricated by a simple stress-driven self-assembly method. The desired optical properties of 3D metamaterials are demonstrated by varying the 2D pattern sizes and arrangement. We also summarize the capabilities to manufacture advanced optical components at TIRI.

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16:50 - 17:05 Manuscript ID.  0661
Paper No.  2020-THU-S1002-O001
Yen-Lin Chen
Award Candidate
Wear Measurement System on the Face of milling Cutter by Structured Light Reconstruction
Yen-Lin Chen;J. Andrew Yeh;Yuan Luo

Two-dimensional information of tool wear can only be extracted by a single camera. In this work phase shifting method is used to reconstruct the end face of milling cutters. The main idea is to establish a milling cutter monitoring system and improve the resolution of system to achieve industrial requirement.

17:05 - 17:20 Manuscript ID.  0713
Paper No.  2020-THU-S1002-O002
Ping-Chen Chiang
Award Candidate
Automatic Inspection System for End Milling Cutter tool
Yu-Hsiang Lin;Ping-Chen Chiang;J. Andrew Yeh;Yuan Luo

In manufacturing industry, tool wear condition is an important factor which affects the precision and yield of product. The traditional assessment of tool wear depends on subjective consciousness and lacks quantitative standards. This research aims to develop an automatic optical inspection system to reconstruct the wear information for milling tool.

17:20 - 17:35 Manuscript ID.  0607
Paper No.  2020-THU-S1002-O003
Jen-Yu Lee
Award Candidate
3D Precise Positioning for Orchard Pests under Strong Sunlight via Intelligent Depth Imaging
Jen-Yu Lee;Ching-Chieh Su;Chia-Ying Chang;Shean-Jen Chen

An outdoor-laser-pest-control system with intelligent depth imaging has been developed via structured lighting of infrared. Structured lighting is high-resolution in depth information, but there are errors under sunlight and in reflective objects. Therefore, we go through parameters reconfiguration and filtering, then significantly reduce the interference of the sun.

17:35 - 17:50 Manuscript ID.  0723
Paper No.  2020-THU-S1002-O004
Hong-Yi Lin
Award Candidate
Surface Contour Measurement of Transparent Glass and Thin Film Coatings by Wavelet Transform
Hong-Yi Lin;Chuen-Lin Tien;Chun-Yu Chiang

Morlet wavelet transform with Fizeau interferometer were used to measure the surface contour of transparent glass and thin films. The surface contour of glass plates and zirconium nitride thin films were reconstructed. The noise comes from rear surface of thin films and substrate can be removed by the proposed method.


Thin-Film Technology and Optical Engineering

Thin-Film Technology and Optical Engineering III
Friday, Dec. 4, 2020  13:10-15:40
Presider: Prof. Bo huei Liao
Prof. Chien Cheng Kuo
Room: 6AB Harvard Lecture Hall
13:10 - 13:25 Manuscript ID.  0198
Paper No.  2020-FRI-S1003-O001
Shao-Yu Liu
Award Candidate
Automatic Fabric Defect Detection by Compact CNN-based Machine Vision
Shao-Yu Liu;Ya-Ti Chang Lee;Chung-Hao Tien

In this study, we developed a deep learning model based on convolutional neural network (CNN) to inspect the fabric surface anomaly. Proposed compact CNN model can achieve 90% classification accuracy and defect segmentation. With advantage of fast and effective, the model has potential to be applied in real-time surface inspection.

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13:25 - 13:40 Manuscript ID.  0522
Paper No.  2020-FRI-S1003-O002
Wen-Chuan Tseng
Award Candidate
Instantaneous Center of Rotation Online Estimation for Tracked Vehicle with Visual-Inertial Odometry
Tzu-Cheng Huang;Wen-Chuan Tseng;Jih-Liang Hsieh;Chia-Ying Chang;Shean-Jen Chen

This paper focuses on how a visual inertial odometry (VIO) fused by extended Kalman filter (EKF) estimates accurately the instantaneous center of rotation (ICR) of tracked vehicle. Employing a modified ICR-based kinematic model has resulted in better pose estimation for skid-steer movement than previous one.

13:40 - 13:55 Manuscript ID.  0202
Paper No.  2020-FRI-S1003-O003
Syuan-You Lin
Award Candidate
Coupling Magnetic Dipole Resonance with Thin-Film Resonator to Develop Surface Enhanced Infrared Absorption Spectroscopy Techniques
Syuan-You Lin;Dao-Yang Wei;Sih-Wei Chang;Shau-Liang Chen;Hsuen- Li Chen

We show that the concept of combining thin film interference and magnetic dipole resonance to develop a surface enhanced infrared absorption (SEIRA) substrate with a large-area electric field hot zone. The substrate use optical constructive interference and magnetic dipole resonance of silicon particles to achieve strong electromagnetic enhancement effect.

13:55 - 14:10 Manuscript ID.  0284
Paper No.  2020-FRI-S1003-O004
Po-Yu Lin
Award Candidate
The realization of Three-Dimensional Photonic Crystal Free-Standing Film based on Monocrystalline BPLC
Po-Yu Lin;Tsung-Hsien Lin

Blue phase liquid crystal is a kind of 3D photonic crystal. In this experiment, we fabricate a free standing monocrystalline BPLC film which can be designed for having the PBG across the entire visible spectrum. In addition, we can replaced different material into a BP template by the replacement technique.

14:10 - 14:25 Manuscript ID.  0508
Paper No.  2020-FRI-S1003-O005
Kuan-Sheng Cheng
Award Candidate
Flux mapping method for improving thickness uniformity of thin films prepared by electron beam evaporation with ion assisted deposition technique
Kuan-Sheng Cheng;Chuen-Lin Tien

A flux mapping methodology for simulating film thickness distribution in E-beam evaporation with ion assisted deposition process to optimize correction mask of three mateials is presented in this paper.The thickness uniformities of the films are 0.88% for TiO2 film, 1.38% for Ta2O5 film, and 2.44% for SnO2 film, respectively.

14:25 - 14:40 Manuscript ID.  0047
Paper No.  2020-FRI-S1003-O006
Pin-Jie Chen
Imprintable Thin-Film Metallic Glasses with Different Crystallinities for Surface-Enhanced Raman Scattering
Pin-Jie Chen;Chun-Hway Hsueh

Periodic nanostructures on Au-based thin-film metallic glasses with different crystallinities were fabricated in the present study for surface-enhanced Raman scattering applications. To achieve this, amorphous films were deposited using co-sputtering and thermal imprinting was adopted to emboss the as-deposited films. The imprinted films were then heat treated for different crystallinities.

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14:40 - 14:55 Manuscript ID.  0195
Paper No.  2020-FRI-S1003-O007
Bo Ying Chen
Top-Gate Germanene Transistors
Bo Ying Chen;Yu Wei Chang;Si Chen Lee;Shih Yen Lin

The polycrystalline elemental 2D material germanene is formed after the post-growth annealing of amorphous germanium deposited by using the thermal evaporation on MoS2/sapphire substrates. With oxidized germanene as the passivation layer, top-gate germanene transistors are fabricated, which have revealed a possible solution of the ultra-thin 2D materials for device applications.

14:55 - 15:10 Manuscript ID.  0258
Paper No.  2020-FRI-S1003-O008
shao-yi weng
Evaluation of metal bonded thin film photo-conductor
shao-yi weng

In this thesis, we tried to make ultra-thin III-V sensor by using indium phosphide epitaxial wafer by thermo-compression bonding. The device could detect signal in the light source proved by input square wave. Quantum dot could also enhance the performance of sensor.

15:10 - 15:25 Manuscript ID.  0625
Paper No.  2020-FRI-S1003-O009
Hsing-Yu Wu
Design and fabrication of a null corrector for use to evaluate a 550mm diameter aspherical space mirror
Hsing-Yu Wu;Li-Chih Hu;Wei-Che Chang;Yung-Hsien Liu;Po-Hsuan Huang;Yi-Kai Huang

Upgraded the optical system from the FORMOSAT-5 satellite, the clear aperture of the 550mm aspherical primary of a Korsch telescope is regarded as a higher quality optical remote sensing satellite in the next decade. This paper addresses the development of a null corrector for use to examine the primary mirror.

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15:25 - 15:40 Manuscript ID.  0105
Paper No.  2020-FRI-S1003-O010
Yang Rong Yu
Optical Properties of Deep-UV Porous AlGaN Distributed Bragg Reflectors
Yang Rong Yu;Kuo Chang Yu;Wang Cheng Jie;Lin Chia Feng

Pipe-AlGaN layers with anisotropic optical properties were formed from n+-AlGaN:Si layers. Central wavelengths of the polarized reflectance spectra were measured when the direction of the linear polarizer was perpendicular and parallel to the pipe structure and the thermal expanded property on the porous AlGaN layers.


Thin-Film Technology and Optical Engineering

Poster Session I
Friday, Dec. 4, 2020  15:40-17:30
Presider: Prof. Sheng-Hui Chen
Room: 6AB Courtyard
Manuscript ID.  0159
Paper No.  2020-FRI-P1001-P001
Yu Ying Hsu
Award Candidate
Improved design and fabrication of a novel dual-stripe micro opto-mechanical resonator for application in the broadband laser interferometer gravitational wave detector
Yu Ying Hsu;Make Ying;Huang Wei Pan;Shiuh Chao

In this study, we design and fabricate a micro-resonator "cat-flap" suspended in an optical cavity as a negative dispersion filter with sub-millimeter scale micromirrors supported by nanometer-thickness flexures. Our goal is to use the ANSYS simulation to optimize the cat-flap and develop fabrication process to increase the quality factor.

Manuscript ID.  0226
Paper No.  2020-FRI-P1001-P002
Ying-Chou Lu
Award Candidate
High-Quality and Transparent VO2 Nanoparticle Films with Excellent Solar Modulation Efficiency
Ying-Chou Lu;Chun-Hway Hsueh

The transparent VO2 nanoparticle film (Tlum = 93.3%) with the excellent solar modulation (ΔTsol = 6.1%) was successfully fabricated on the quartz substrate which improves the drawback of the VO2 film with brownish-yellow color. Its thermochromic property is expected to be a promising material for smart window applications.

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Manuscript ID.  0055
Paper No.  2020-FRI-P1001-P003
Ann-Kuo Chu
Award Candidate
Silicon surface passivation using supercritical CO2 fluid
Ke-Liang Lin;Kung-Hung Wang;Wei-Chen Tien;Ann-Kuo Chu

A novel silicon surface passivation technique using supercritical CO2 fluid with oxidant (H2O2) is proposed. The treated double-sided Si surfaces were further passivated by depositing a thin n-type poly-Si layer using VHF-PECVD system. The carrier lifetime of the silicon surface after the passivation of the poly-Si/SiOx stack is 1.23 ms.

Manuscript ID.  0130
Paper No.  2020-FRI-P1001-P004
Yu-Hsuan Hsu
Award Candidate
Development of Transparent Conductive of ZnO/Ag/ZnO Multilayers for Flexible Device Applications
Yu-Hsuan Hsu;Sood Apoorva;Wan-Yu Wu;Ray-Hua Horng

The transparent conductive ZnO/Ag/ZnO multilayers were deposited on flexible PI substrate by HiPIMS in low temperature without additional heating. An excellent transparent in visible wavelength and lowest resistivity were obtained in 88% and 5.5x10-5 Ωcm, respectively. The performance of vertical LED was compared before and after bonding using the multilayers.

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Manuscript ID.  0323
Paper No.  2020-FRI-P1001-P005
YeHsin Ko
Award Candidate
Resistive Random Access Memory Based On Inorganic Halide Perovskite
YeHsin Ko;YouSyuan Chen;ChihChiang Yang;YanKuin Su

All-inorganic perovskite has been widely used in various fields such as light emitting diode, solar cells, and memory devices. In this work, the resistive switching memory with a structure of ITO/CsPbBr3/Au showed typical bipolar resistive switching characteristic with high ON/OFF ratio (>103) , large repeat cycle(>200).

Manuscript ID.  0729
Paper No.  2020-FRI-P1001-P006
Shu- Hui Su
Award Candidate
Thin Film Based Fiber-Optic Sensors for Detecting Temperature and Relative Humidity
Chuen-Lin Tien;Ting-Yi Wang;Shu- Hui Su

Lossy mode resonance effect combined with D-shaped multimode fiber was used to fabricate a temperature and humidity fiber sensor. The sensitivity of the temperature sensor is 1.2 nm/°C in the range of 30 to 60°C. The relative humidity sensitivity is 1.0 nm/RH% in the relative range of RH30% to RH60%.

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Manuscript ID.  0348
Paper No.  2020-FRI-P1001-P007
Yan-Hao Wang
Award Candidate
High Performance Solution Processed Light Emitting Diodes by Doping Polymer Luminescent Material based on Quantum Dot
Yan-Hao Wang;Hsin-Yu Pan;Jia-Zhen Li;Chih-Chiang Yang;Yan-Kuin Su;Hoang-Tuan Vu

The polymer luminescent materials Poly(9-vinylcarbazole) are doped in quantum dot light emitting diode which let the excess electrons form excitons with the injected holes from the hole transport layer, and the performance is enhanced by Förster resonance energy transfer. The maximum of luminance and efficiency reached to 69055cd/m2 and 6.5cd/A.

Manuscript ID.  0526
Paper No.  2020-FRI-P1001-P008
Chien Chao
Award Candidate
The Effect of Oxygen Annealing Treatment for Amorphous Aluminum Indium Zin Tin Oxide Thin Film Transistors
Chien Chao;Ya-Han Li;Tsung-Che Chiang;Yi-Ru Shih;Zhen-Hao Li;Po-Tsun Liu

In this work, we present that by moderating AIZTO TFTs by annealing at different temperatures and annealing time, the electrical performance enhanced. Annealing with oxygen gas atmosphere could eliminate the oxygen vacancy in the channel and suppress the leakage current phenomenon. These advantages allow it to develop next-generation display.

Manuscript ID.  0793
Paper No.  2020-FRI-P1001-P009
Chun-Hao Hsieh
Award Candidate
Fabrication of Soil Moisture Sensor by Side-Polished Fiber and SnO2 Thin Film
Chun-Hao Hsieh;Chuen-Lin Tien;Pin-Jyun Hou;Yi-Sheng Li

We proposed a soil moisture sensor using fiber side-polishing and RF magnetron sputtering techniques. Tin oxide film was coated on the D-shaped multi-mode fibers to make a high sensitivity fiber sensor. Lossy mode resonance effect was used to detect the soil moisture. The sensitivity of 2.15 nm/RH% was achieved.

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Manuscript ID.  0476
Paper No.  2020-FRI-P1001-P010
Ya-Chu Lee
A TFT Biosensor Integrated With a Microfluidic Channel for Real-Time Monitoring Biochemical Reactions
Ya-Chu Lee;Jian-Jang Huang;Yao-Hsuan Lai;Jin-Chun Lim

In this work, the metal-oxide TFT (thin-film transistor) biosensor integrated with a microfluidic channel was developed to investigate biochemical reaction kinetics. Using the malate-aspartate shuttle as an example, we established the correlation between the molecular diffusion behaviors in the microfluidic channel and the TFT current responses.

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Manuscript ID.  0509
Paper No.  2020-FRI-P1001-P011
Sheng-Po Chang
An Amorphous (Al0.12Ga0.88)2O3 Deep UV Photodetector
Shu-Bai Liu;Shoou-Jinn Chang;Sheng-Po Chang;Wei-Chih Lai

The authors report the deposition of an (AlxGa1-x)2O3 amorphous thin film on sapphire substrates by sputter deposition. An amorphous deep UV (Al0.12Ga0.88)2O3 photodetector, with a cutoff wavelength at 230 nm, was also fabricated.

Manuscript ID.  0714
Paper No.  2020-FRI-P1001-P012
Teh-Li Chan
Obliquely bideposited silver nano-zigzag arrays for SERS application
Yi-Jun Jen;Teh-Li Chan;Ming-Yang Cong;Wei-Chen Liu

Obliquely bideposition was used to deposit silver nano-zigzag arrays with different sizes. When the nano-zigzag array was illuminated with electromagnetic wave, electrical field was enhanced around the corners of the zigzag. The hot spots are found to support the SERS signals in measurement.

Manuscript ID.  0172
Paper No.  2020-FRI-P1001-P013
Szu Wei Wu
Encapsulation technology of flexible Micro LED
Szu Wei Wu

A highly reliable encapsulation method was developed for flexible Micro LED. The technology implemented on flexible TEG was loaded on testing module with a folding radius of 5 mm.

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Manuscript ID.  0573
Paper No.  2020-FRI-P1001-P014
Shih-Chun Hsu
Non-contact Hydrochloric Acid Concentration Measurement Using a Birefringent Polymer Transducer in Heterodyne Interferometer
Ruey-Ching Twu Twu;Kai-Hsuan Li;Shih-Chun Hsu;Shu-Quan Qiu

A birefringent polymer transducer was used for the hydrochloric acid concentration measurements in a common path heterodyne interferometer. The achievable measurement resolutions of RI and concentration are 6.94×10-6 RIU and 16.7 ppm, respectively.

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Manuscript ID.  0715
Paper No.  2020-FRI-P1001-P015
Yen-Yin Feng
Tamm plasmon wave excited between a silver nanoparticle array and all-dielectric Bragg mirror
Yi-Jun Jen;Bo-huei Liao;Wei-Chen Liu;Yen-Yin Feng;Wei-Chieh Ma

In this work, glancing angle deposition was applied to deposit an ultra-thin nanoparticle array on a Bragg mirror. The transmission spectrum shows that the Tamm plasmon wave was excited at a wavelength of 578 nm. It is demonstrated that a surface wave has been excited underneath the nanoparticles.

Manuscript ID.  0445
Paper No.  2020-FRI-P1001-P016
Chieh Chou
Effect of thermal annealing on the structural and transport properties of Bismuth thin films
Yu Xiao;Chieh Chou;Hao-Hsiung Lin

We investigate the effect of thermal annealing on the structural and electrical properties of 80-nm-thick Bismuth (Bi) thin films with grains. The thermal process brings Bi thin film greater magnetoresistance ratio (MR) and carrier mobilities due to improved material crystallinity.

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Manuscript ID.  0456
Paper No.  2020-FRI-P1001-P017
Yu-Hsing Lin
A comparative study of optical properties and surface roughness of AlOxNy Film deposited by HiPIMS and DOMS
Yu-Hsing Lin;Chang-Ze Hong;Chien-Jen Tang

Aluminum oxynitride films were prepared by high power impulse magnetron sputtering and deep oscillation magnetron sputtering. The influence of processes on crystalline structures, optical properties and surface roughness of films were investigated by spectroscopic elliposmeter and UV-VIS-NIR spectrometer.

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Manuscript ID.  0637
Paper No.  2020-FRI-P1001-P018
Jian-Yu Li
Influence of Optical Properties of Thermochromic W-doped VO2 Films deposited by High Power Impulse Magnetron Sputtering
Jian-Yu Li;Ching-Tang Li;Chang-Ze Hong;Chien-Jen Tang

Thermochromic VO2 and W-VO2 films were prepared by HiPIMS with substrate temperature at 300 °C. The transition temperature of VO2 and W-VO2 films were 68 °C and 46 °C, respectively. The thermochromic properties and optical constants of VO2 and W-VO2 were analyzed by spectrometer and ellipsometer.

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Manuscript ID.  0643
Paper No.  2020-FRI-P1001-P019
Tzu-Ning Cheng
Farnsworth D-15 color-blindness test by wearing an optical notch filter
Tzu-Ning Cheng;Jin-Cherng Hsu

We have studied the color discriminations of human test experiments before and after wearing a notch filter, which has a 20 nm full-width at half maximum (FWHM), 8.5% low transmittance at the reference wavelength of 580 nm.

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Manuscript ID.  0745
Paper No.  2020-FRI-P1001-P020
Thanh Duy Cu
Analysing the morphology of anti-glare coatings for low sparkle
Thanh Duy Cu;Chien-Cheng Kuo

Anti-glare coatings for electronic device screens with low sparkle were prepared via the sol-gel process using spray methods. Simulation was used to predict the influence of the surface morphology on the sparkle value. The sparkle value was optimized at the appropriate diameter.

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Manuscript ID.  0095
Paper No.  2020-FRI-P1001-P021
Hao-Yuan Lin
High Dynamic Range Optimization for Metal Surface Phase-Shift Measurement
Hao-Yuan Lin;Ju-Yi Lee;Bing-Lin Ho

In terms of 3-D scanning, the most difficult thing to overcome is to scan metal objects. High Dynamic Range (HDR) is a suitable way to solve this problem. The main purpose of this paper is to optimize HDR by automatically calculation of the best exposure time.

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Manuscript ID.  0127
Paper No.  2020-FRI-P1001-P022
Lee Meng-Lin
Effects of Different Purification Solvents on The Properties of Perovskite CsPbBr3 Quantum Dots
Lee Meng-Lin

We present a simple proprietary purification system for the synthesis of high-quality perovskite CsPbBr3 quantum dots with high photoluminescence quantum yield by introducing purification solvents, that is, ethyl acetate, ethyl acetate:hexane, acetone, acetone:hexane into a crude solution. Optimal material and light characteristics were exhibited with the ethyl acetate:hexane purification solvent.

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Manuscript ID.  0462
Paper No.  2020-FRI-P1001-P023
Shan Yeh
The Time Response for the Low Temperature Poly-Silicon Thin-Film Transistors to the X-ray Irradiation Pulse
Ya-Hsiang Tai;Shan Yeh;Wei-Lin Chen

The time response behavior of low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs) to the X-ray irradiation pulse with different frequencies is analyzed. The formulas for excited and recovering behaviors are proposed to be possibly used for the circuit performance in real situation. The predicted and measured results fit fairly well.

Manuscript ID.  0665
Paper No.  2020-FRI-P1001-P024
Ming-Fu Liu
Characteristics of Calcium Ion Sensor Based on Hydrogen-Bonded Cholesterol Type Liquid Crystal
Ming-Fu Liu;Bo-Xiang Peng;Jen-Wei Hung;Shug-June Hwang

A hydrogen-bonded polymer cholesteric liquid crystal (PCLC) is proposed as a metal sensor. Calcium ion makes the crosslinking degree of the PCLC increase and then causes the PCLC pitch shrink and its reflected wavelength blue-shift. The sensing performance is studied by measuring the wavelength shift induced by metal ion.

Manuscript ID.  0158
Paper No.  2020-FRI-P1001-P025
Ting-Wei Hsu
The Enhancement of Light Harvesting using Leaf Structures Surface on Thin-Film Luminescent Solar Concentrators
Ting-Wei Hsu;Bing-Mau Chen;Shang-Ping Ying

In this study, the leaf-structures are patterned onto thin-film LSCs using inorganic phosphor .It is found that the efficiencies of thin film LSCs covered with replica layers of Bauhinia and Epipremnum aureum are higher than the one with flat encapsulation layer.

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Manuscript ID.  0347
Paper No.  2020-FRI-P1001-P026
Yun-Ting Tsai
TiO2 Nanostructures Applied On Non-Enzyme Glucose Sensor
Yun-Ting Tsai;Jhih-Yuan Jhu;Chih-Chiang Yang;Yan-Kuin Su

Nowadays, the applications of nanostructure have increased. Because of the characteristics of the stable chemical structure and photoelectric properties, TiO2 are often used in our life. In this study, TiO2 nanostructures were prepared by hydrothermal method and the non-enzymatic glucose sensor has high sensitivity (37.31𝜇A𝑐𝑚−2/m𝑀).

Manuscript ID.  0433
Paper No.  2020-FRI-P1001-P027
Yu-Hung Yen
Optical Modulation and Cycle Stability of All-Solid-State ITO/WO3/Li-NbO3/NiO/ITO Device Deposited with Magnetron Sputtering
Yu-Hung Yen;Kun-Hong Chen;Hsi-Chao Chen;Yu-Xuan Zhuang;Xin-Ya Zheng

Nickel oxide (NiO) was used as an auxiliary color-changing layer for an all-solid-state ITO/WO3/Li-NbO3/NiO/ITO device deposited with magnetron sputtering. NiO film was deposited at different oxygen flow rates from 4-10 sccm. When the oxygen flow rate is 4 sccm, the optical modulation at a wavelength of 550 nm is 53.4%.

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Manuscript ID.  0699
Paper No.  2020-FRI-P1001-P028
Shao-Pu Wu
Porous Polydimethylsiloxane Elastomeric Dielectric for Wide-Range Capacitive Pressure Sensing
Shao-Pu Wu;Gen-Wen Hsieh;Liang-Cheng Shih

We report a flexible capacitive pressure sensor based on a porous dielectric film of polydimethylsiloxane for wide-range pressure sensing. A 2-propanol aqueous solution is employed as the porogen for the formation of porous microstructures with controlled size. Improved pressure sensing performance and the capability for different stimuli are discussed.

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Manuscript ID.  0627
Paper No.  2020-FRI-P1001-P029
Hsing-Yu Wu
The improvement of automatic precision process to generate high quality lightweight spaceborne mirrors
Hsing-Yu Wu;Li-Chih Hu;Wei-Che Chang;Yung-Hsien Liu;Po-Hsuan Huang;Yi-Kai Huang

To meet the missions of earth observation in the next decade, optical remote sensing systems require totally 8 optical satellites. Among these, more than 24 lightweight spaceborne mirrors will be fabricated on schedule. This paper reports the development in automation for the rapid, cost-effective, and high quality light-weighted processing process.

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Manuscript ID.  0636
Paper No.  2020-FRI-P1001-P030
Yu-Jen Hsu
Patterning of Fused Silica Surface by CO2 Laser and Their Microstructure Characterizations
Yu-Jen Hsu;Hsing-Yu Wu;Wei-Che Chang;Yung-Tang Nien

Fused silica was patterned by a continuous CO2 laser with an energy density of 0.24 J/mm2, presenting agglomerated nanoparticles of <100 nm in the groove of around 20 μm deep and 153 μm wide. Chemical analysis indicated the removal of silicon-related impurities in laser processing, inducing more purified silica surface.

  Preview abstract
Manuscript ID.  0744
Paper No.  2020-FRI-P1001-P031
Yan He Liu
Optical properties of ITO/ Nb doping TiO2 double layer thin films deposited by sputtering
Yih-Shing Lee;Yan He Liu;Cheng-jia Tang

The results of experimental ITO/TNO double layers, the thickness combination with 70/30 nm has the lowest the average reflectance, which was reduced by 2.3% and the experimental result showed the same trend with the simulated results.

  Preview abstract
Manuscript ID.  0757
Paper No.  2020-FRI-P1001-P032
Analyzing Adhesion and Crack of Antireflection Coating on Plastic Substrates by Plasma-Assisted Atomic Layer Deposition
HE YE-YO;Liu Tzu-Fan;Kuo Chien-Cheng

Plasma-assisted atomic layer deposition was used in this experiment. The antireflection (AR) film was coated on the plastic substrate to test the adhesion and film crack. The optimized parameters were found for coating on the curved-surface micro lens. The reflectivity and uniformity of each point were measured by optical microscope.

  Preview abstract
Manuscript ID.  0343
Paper No.  2020-FRI-P1001-P033
Wei-Hsiang Chen
The Fabrication of a White Light Blinded Al/TiO2/Si MIS Photo-detector With UV Enhanced Photo Responsivity
Ming Chang Shih;Wei-Hsiang Chen;Chi-Bin Weng

We demonstrate the fabrication of a Si based metal insulator semiconductor (MIS) photo-detector of the Al/TiO2/Si structure and its characteristics of photo-responsivity. White light blinded enhancement of photo responsivity around UV can be effectively achieved by simply tuning the TiO2 thickness.

  Preview abstract
Manuscript ID.  0554
Paper No.  2020-FRI-P1001-P034
Chuen-Lin Tien
The Coefficient of Thermal Expansion and Thermal Stress in SiO2(Ge/SiO2)11 Multilayer Thin Films
Chuen-Lin Tien;Hung-Ching Pai;Hong-Yi Lin

The mid-infrared bandpass filter of SiO2(Ge/SiO2)11 multilayer films was fabricated by electron beam evaporation with ion assisted deposition. Residual thermal stress and thermal expansion coefficient of the mid-infrared bandpass filter was measured by an optical interferometer with heating temperature range of 20-100℃.

  Preview abstract
Manuscript ID.  0701
Paper No.  2020-FRI-P1001-P035
Huang Yu Sheng
The electrical properties of In-doped ZnO thin films annealed under NH3 ambient
Huang Yu Sheng;Wang Yao Te

In this work, In-doped ZnO thin films were prepared by ultrasonic spray pyrolysis, then annealed in NH3 at temperature of 500°C for 30 minutes. The highest In-doped ZnO thin films were converted into p-type semiconductors, with the highest hole concentration of 2.4×1019 cm-3 and the lowest resistivity of 0.19 Ω-cm.

  Preview abstract
Manuscript ID.  0722
Paper No.  2020-FRI-P1001-P036
Sui-Hua Wu
Use of DC reactive magnetron sputtering to grow high-quality AlN on Si<111> substrate
Sui-Hua Wu;Wei-Sheng Liu;Yu-Lun Jiang;Chung-Kai Chi

A high-quality AlN film was grown using DC magnetron sputtering technology with a Al intermediate film deposited pre-sputtering on a Si <111> substrate at 300 °C. We observed that the film crystal orientation was AlN<100> and the surface roughness of the aluminium-containing film was better than that without aluminium.

Manuscript ID.  0049
Paper No.  2020-FRI-P1001-P037
Pei-Ying Chen
Effect of Smartphone Settings on Screen Viewing Safety
Pei-Ying Chen;En-Le Su;Min-Chi Hsieh;Pin-Jen Chen;Jin-Ting Lin;Ming-Li Chou;Po-Ting Yeh;Jwo-Huei Jou

We use three smartphones to study how three features, i.e. blue light filter mode, brightness adjustment, and dark mode, affect viewing safety. Amongst, adjusting brightness is the most effective, which can increase the viewing time by 20 to 48% while adopting blue light filter mode is the least effective.

  Preview abstract

Thin-Film Technology and Optical Engineering

Thin-Film Technology and Optical Engineering IV
Saturday, Dec. 5, 2020  10:30-12:30
Presider: Prof. Chih Jen Yu
Room: 6AB Harvard Lecture Hall
10:30 - 10:45 Manuscript ID.  0506
Paper No.  2020-SAT-S1004-O001
Hong-Yi Lin
Measurement and Prediction of Residual Stress in Optical Notch Filter
Hong-Yi Lin;Chuen-Lin Tien

This work presents multilayer notch filters prepared by electron beam evaporation. The residual stress in notch filters were predicted and measured. The experimental results show that the transmittance meets the requirements, and the difference between the predicted stress value and the measured stress value is about 28 MPa.

10:45 - 11:00 Manuscript ID.  0507
Paper No.  2020-SAT-S1004-O002
Yan-Tong Lai
Measurement of warpage and residual stress of multilayer thin film coated on 8-inch silicon Wafers
Yan-Tong Lai;Chuen-Lin Tien

This work presents the warpage and residual stress in multilayer films coated on the 8-inch silicon wafers. We use the structured-light illumination, fringe reflection technique, and sub-aperture stitching method to measure surface warpage and radius of curvature for wafers. The residual stress in multilayer thin films .

11:00 - 11:15 Manuscript ID.  0432
Paper No.  2020-SAT-S1004-O003
Sheng-Bin Chen
Finite Element Simulated Residual Stress of Flexible Nb2O5/SiO2 Multi-layer Films Deposited by E-gun with Ion-beam Assisted
Sheng-Bin Chen;Kun-Hong Chen;Hsi-Chao Chen;Yu-Ru Lu;Xun Xie;Wei-Lin Chen

The (Nb2O5/SiO2)4 multi-layer film was deposited by E-gun with ion-beam assisted (IAD) on PET substrate. Residual stress was simulated by finite element method and measured by moiré interferometer. The residual stress was compressive and shearing stress was tensor, and the error of finite element simulated was less than 2%.

11:15 - 11:30 Manuscript ID.  0085
Paper No.  2020-SAT-S1004-O004
Hsiang-Chih Cheng
Interface improvement using crosslinkable hole transporting layer for perovskite quantum-dot light-emitting diodes
Hsiang-Chih Cheng;Yen-Hsiang Huang;Chun-Cheng Lin;Zong-Liang Tseng;Lung-Chien Chen Chen

In this report, we investigated and reported a thermally crosslinkable 9,9-Bis[4-[(4-ethenylphenyl)methoxy]phenyl]-N2,N7-di-1-naphthalenyl-N2,N7-diphenyl-9H-fluorene-2,7-diamine (VB-FNPD) film used as the hole transporting layer of perovskite CsPbBr3 quantum-dot light-emitting diodes. And it show pretty good performance.

  Preview abstract
11:30 - 11:45 Manuscript ID.  0395
Paper No.  2020-SAT-S1004-O005
Chun Sheng Huang
A Method of Growth Inorganic Cesium Lead Bromide Perovskites film on P-GaN substrate by Chemical Vapor Deposition
Chun Sheng Huang

Here propose a method to grow an inorganic perovskite CsPbBr3 thin film on P-GaN substrate by low pressure chemical vapor deposition (LPCVD). We optimized the growth parameters by optical property of radiative. We achieve the preliminary perovskites LED structure with growing perovskite by LPCVD, ZnO layer and silver contact.

  Preview abstract
11:45 - 12:00 Manuscript ID.  0471
Paper No.  2020-SAT-S1004-O006
Wei-Yung Weng
Development of a real-time image recognition system for driving birds away
Ming-Hong Chang;Wei-Yung Weng;Yu-Pin Lan

This research successfully developed a real-time image recognition method to count the number of birds and drive birds off, including a laser source, an algorithm for image recognition, motor control units, and solar-charged devices. The image recognition algorithm successfully counts the high-speed moving object on CCDs.

  Preview abstract
12:00 - 12:15 Manuscript ID.  0754
Paper No.  2020-SAT-S1004-O007
Ho-Yu Yang
Low stress Diamond-like Carbon film applied to Anti-reflection film of thermal imaging system
Ho-Yu Yang;Zi-Jie Xu;Chien-Cheng Kuo

Diamond-Like Carbon film applied to anti-reflection film under 450 W radio-frequency power and 800W microwave power was used to coat the diamond-like carbon film for 90 minutes. The infrared transmittance in the 3~5μm band can reach 71.18%, and the hardness can reach 5.27 GPa.

  Preview abstract
12:15 - 12:30 Manuscript ID.  0555
Paper No.  2020-SAT-S1004-O008
Chien-Te Liu
Conductive property for the photo-polymerization additive manufacturing component
Chien-Te Liu;Hsi-Fu Shih

This paper used silver power mixed with photosensitive resin and applied two photo-polymerization configurations to the 3D printing. By changing different parameters, the printing resolution and solidification could be compared It was verified that the feasibility of producing conductive components using the technology of photo-polymerization additive manufacturing.


Thin-Film Technology and Optical Engineering

Poster Session II
Saturday, Dec. 5, 2020  10:30-12:30
Presider: Prof. Wen-Jeng Ho
Room: 6AB Courtyard
Manuscript ID.  0066
Paper No.  2020-SAT-P1002-P001
Yi-Hsuan Chou
Effects of Light Color of Desk Lamp and Font Size of Textbook on Reading Clarity and Safety
Yi-Hsuan Chou;Liu-Fang Hsieh;Chih-Chi Lin;Jia-Wei Huang;Jing-Hsiu Chen;Ya-Chen Hsieh;Ming-Li Chou;Po-Ting Yeh;Jwo-Huei Jou

From elementary school to university, font size of textbook is getting smaller, making reading harder. We found the illuminance required for reading increases with the decreases of font size, which might cause more damage to retina and more suppression of melatonin generation. Reading with blue light-less is much more friendly.

  Preview abstract
Manuscript ID.  0135
Paper No.  2020-SAT-P1002-P002
Epitaxial Growth of Gallium Oxide on Aluminium Nitride Buffer Layers by Hydride Vapor Phase Epitaxy

Epitaxial gallium oxide was grown on Al2O3 substrates with the insertion of aluminum nitride buffer layers by Hydride Vapor Phase Epitaxy. The surface morphologies and epi-film crystallinity were examined by scanning electron microscopy and X-ray diffraction. The transmission spectrum exhibited the bandgap of Ga2O3 on (001) sapphire is 4.29 eV.

Manuscript ID.  0518
Paper No.  2020-SAT-P1002-P003
Yu-Chia Cheng
Related application of 3D printing technology making electronic circuit blocks – components buried
Da-Wei Kuo;Yu-Chia Cheng;Chien-Ming Chen

This study is described about the application of three-dimensional interconnects circuit block printed out using the commercial FDM printer. The conductor filaments were made out of carbon-based conductive composites. The ICs and resistances were embedded in the middle of the circuit block for its lower power consumption.

  Preview abstract
Manuscript ID.  0205
Paper No.  2020-SAT-P1002-P004
Yu Yu Ho
The highly brightness transparent AMOLED display Process
Yu Yu Ho;Wei Lung Tsai

In response to smart living environment and application fields for the future, this study using OLED displays combine a high-transparency composite electrode technology. It successfully developed 17inch AMOLED display with average transparency of 70.6% and average brightness of 483.2 nits.

  Preview abstract
Manuscript ID.  0360
Paper No.  2020-SAT-P1002-P005
Chi Wei Huang
The Study of InGaAs-Based p-i-n Band-Pass Near-IR Photodetector Grown by Metal-Organic Chemical Vapor Deposition
Chi Wei Huang;Chun Kai Wang;Yu Zung Chiou;Jie Si Jheng

In this article, the InGaAs-based p-i-n band-pass near-IR photodetectors (PDs) grown by metal-organic chemical vapor deposition (MOCVD) were fabricated and investigated. It was found that the PDs have a lower dark current level at 0 V, and the PDs show the characteristics of the band-pass.

  Preview abstract
Manuscript ID.  0558
Paper No.  2020-SAT-P1002-P006
yen-sheng lui
Simulation Research of Pixel Polarization Sensor
yen-sheng lui

This work will studying special pixel polarization sensor that wil calculated the incident light for pixel polarization. By using hardware detection, the pixel polarization can be calculated, and the polarization effect of the reflected light from the object can be cut off. This way can effectively eliminate glare.

  Preview abstract
Manuscript ID.  0719
Paper No.  2020-SAT-P1002-P007
Lai Yi Chun
Improving the device characteristic of IGZO thin film transistors by plasma treatment with double-gate structure
Lai Yi Chun;Liu Wei Sheng;Hsu Chih Hao;Jiang Yu

We investigated the characteristics of IGZO thin film transistor (TFT) by mixed plasma treatment with the double-gate structure. From the result can find that the oxygen vacancy of IGZO decreases after using plasma treatment with the double-gate structure. Hence, the IGZO TFT showing excellent device characteristics and high stability.

Manuscript ID.  0050
Paper No.  2020-SAT-P1002-P008
Chih-Ying Huang
Effects of Different Bluelight-Filtering APPs on Reading Safety and Human Health
Chih-Ying Huang;Yun-Ni Huang;Hao-Jen Chen;Ching-Chih Hsu;Ming-Li Chou;Po-Ting Yeh;Jwo-Huei Jou

Four bluelight-filtering Apps that have more than 1,000,000 downloads have been investigated. We found that App-4 to have the best protection on retina and melatonin generation. It works by effectively filtering the blue light. As to the second most effective App (App-1), it works by simply decreasing the screen brightness.

  Preview abstract
Manuscript ID.  0153
Paper No.  2020-SAT-P1002-P009
Li-Wei Yao
High-efficiency oriented transparent film heater development technology
Li-Wei Yao;Yi-Rong Lin;Yu-Jing Lin;Hsiao-Fen Wei;Kai-Ming Chang;Yan-Shu Li

The high-efficiency oriented flexible transparent film heater was achieved a stable and uniform temperature after 2 minutes, the heating rate is 0.25℃/sec, the highest temperature can reach 52.6℃, and it can be found in 15 seconds from the actual measurement achieve a complete defogging effect.

  Preview abstract
Manuscript ID.  0164
Paper No.  2020-SAT-P1002-P010
Hung Tsou
Highly protective structure of transparent display encapsulation technology
Hung Tsou

Transparent display screens are a new development technology. These transparent display screens are used interaction system. These transparent display screens need highly protective. The highly protective structure are high hardness, high abrasion resistance, high impact resistance and high transparent.

  Preview abstract
Manuscript ID.  0391
Paper No.  2020-SAT-P1002-P011
Dan-Jia Shen
Tunable Measurement System for Reconstructing Surface Profile of an Object
Dan-Jia Shen;Chih-Hsiung Lin;Kun-Huang Chen

This paper proposes a tunable surface profile measuring system that suitable the various object’s surface measurement. To validate the proposed approach, a coin and a plaster status were measured. The proposed method attains a high precision, high resolution, and high stability under various object’s surfaces.

Manuscript ID.  0512
Paper No.  2020-SAT-P1002-P012
Wen-Hsuan Kuan
Theoretical Modeling of Electromagnetic Wave Di ffraction with Triangular Apertures and Lattices
Wen-Hsuan Kuan

The theoretical modeling of diffraction of electromagnetic waves with asymmetric triangular aperture and lattices shows that the center of the 0th-order diffraction spot is off-axial and frequency-dependent, and it is available to manipulate the number of diffraction orders as well as the EM-wave polarization and handedness.

Manuscript ID.  0668
Paper No.  2020-SAT-P1002-P013
Cheng-Chung Jaing
Design and Implementation of Antireflection Coating of Ta2O5 and SiO2 films for Silicone Layers
Shao-Jung Kan;Shu-Jung Chung;Hsiang-Yi Liu;You-Yi Chen;Chen-Chi Huang;Cheng-Chung Jaing;Bing-Mau Chen;Pang-Shiu Chen;Shang-Ping Ying

The antireflection coatings composed of Ta2O5 and SiO2 films prepared on silicone layers by electron-beam evaporation at a substrate temperature of 200 degrees were designed and fabricated. The optical performance and properties of AR coatings, silicone layers, Ta2O5 and SiO2 films were investigated with spectrophotometer and spectroscopic ellipsometer.

  Preview abstract
Manuscript ID.  0688
Paper No.  2020-SAT-P1002-P014
Deng-Yun Zheng
Effects of O2 Plasma Treatments on Photolithographically Patterning an Organic Conductive Material
Deng-Yun Zheng;Meng-Hsiang Chang;Ci-Ling Pan;Masahito Oh-e

We aim to observe the effects of two additional oxygen (O2) plasma treatments on conventional photolithographic patterning of poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), expecting to observe how O2 plasma increases the uniformity of the patterns and how it changes the thickness and cross-sectional U-shaped profiles of the patterns.

  Preview abstract
Manuscript ID.  0352
Paper No.  2020-SAT-P1002-P015
Zong Han LIN
Investigation of MgZnO/Ga2O3 Dual-Band Ultraviolet Photodetectors with Different Thicknesses of SiO2 Inserting Layer by RF Magnetron Sputter
Zong Han LIN;Chun Kai Wang;Yu Zung Chiou;Jie Si Jheng

In this study, MgZnO/Ga2O3 dual-band ultraviolet photodetectors with different thicknesses of SiO2 inserting layer by RF magnetron sputter system were fabricated. The optoelectrical properties of the devices were investigated. The PD with a 25-nm-thick SiO2 inserting layer demonstrated a better dual-band responsivity due to effectively blocking effect of the electron.

  Preview abstract
Manuscript ID.  0086
Paper No.  2020-SAT-P1002-P016
Wan-Chun Yang
Photocatalytic Study of Tin Oxide on Si substrate with Silver Nitrate Pretreated Surface
Wan-Chun Yang;Wen-How Lan

The effect of silver nitrate mist treated substrate to tin oxide film was studied by spray pyrolysis method at 350℃ and 500℃. Films with combined absorption of SnO2/Sn3O4 were characterized. The film deposited at 350℃ with treatment shows the improved visible-light photodegradation ability to RhB. The mechanism was discussed.

  Preview abstract
Manuscript ID.  0422
Paper No.  2020-SAT-P1002-P017
Yi-Ru Shih
N2O plasma Treatment for Passivation Layer of Aluminum Indium Zinc Tin Oxide Thin Film Transistors
Yi-Ru Shih;Ya-Han Lin;Tsung-Che Chiang;Chao Chien;Zhen-Hao Li;Meng-Chun Lin;Po-Tsun Liu

The electrical performance of Al-doped a-IZTO (AIZTO) TFTs is investigated and then SiO2 deposited by PECVD are adopted as the passivation layer. The optimized device of passivated a-AIZTO TFT exhibited mobility of 27.25 cm2/V-s, threshold voltage of -0.55 V and subthreshold swing of 0.315 V/decade.

Manuscript ID.  0538
Paper No.  2020-SAT-P1002-P018
Chuen-Lin Tien
Hydrophobic Thin Films Prepared by PECVD Method for Optical Ophthalmic Lenses
Chuen-Lin Tien;Wu-Chung Peng;Shu- Hui Su

We used hexamethyldisiloxane (HMDSO) to prepare the hydrophobic thin film by plasma enhanced chemical vapour deposition with different flow rates. The residual stress of the thin films deposited on BK7 glass was measured by Twyman-Green interferometer. The properties of hydrophobic thin films deposited at different flow rates was investigated experimentally.

Manuscript ID.  0054
Paper No.  2020-SAT-P1002-P019
Fang Chung Hsuan
Effects of Browsing Smartphone in Darkness on Eyes and Physiology
Fang Chung Hsuan;Wang Chien Yun;Zhuang Zhi Xiu;Lee Hsun;The Luke;Hui Cheng Ming;Chou Ming Li;Yeh Po Ting;Jou Jwo Huei

Our study found that browsing smartphone in darkness is actually much safer than with the presence of background light. Taking browsing distance of 20 cm at 5.7 lux (25%), it is 5.3 times safer for retina and 1.8 times friendlier to physiology without background light than with at 56 lux.

  Preview abstract
Manuscript ID.  0142
Paper No.  2020-SAT-P1002-P020
Shih-Han Hung
An enzymatic modified glucose sensor with a calibration free measurement system
Shih-Han Hung;Min-Rui Wu;Guan-Yu Ji;Cheng-Chih Hsu

In this study, the heterodyne interferometer was used to measure the glucose
concentration which is in an enzymatic modified cuvette. According to the result, proposed
method can demonstrate that the resolution of 4 mg/dl. Within the dynamic range of 1 ~ 400
mg/dl, the calibration curve exhibited the high linearity.

  Preview abstract
Manuscript ID.  0385
Paper No.  2020-SAT-P1002-P021
Chieh Chou
Observation of weak anti-localization in a bismuth thin film grown by MBE
Chien-Cheng Lu;Chieh Chou;Hao-Hsiung Lin

Temperature-dependent Hall measurement was used to study the electrical transport properties of bismuth thin film. Classical three-band model considering metallic surface and semiconductor bulk was applied. Result shows that the surface electron density is about 1E13 /cm2. Besides the classical transport behavior, weak antilocalization (WAL) phenomenon was observed at 3~20K.

  Preview abstract
Manuscript ID.  0543
Paper No.  2020-SAT-P1002-P022
Wun-Yan Chen
Fabrication and Characterization of Wide-direct-bandgap CdS Thin Film Prepared by RF Magnetron Sputtering
Fang Hsing Wang;Yu-Che Chiu;Wun-Yan Chen;Han-Wen Liu

Wide-direct-bandgap semiconductors have attracted much attention in optoelectronics. This work prepared CdS films by sputtering with different working pressure. The films achieved the lowest resistivity of 71.7 Ω-cm at 5 mTorr. It had high absorption in blue light region and the optimal responsivity of 6.92 A/W at 444 nm.

Manuscript ID.  0655
Paper No.  2020-SAT-P1002-P023
Cheng-Chung Jaing
Optical and Mechanical Properties of Sputtered Tungsten Thin Films from 6 nm to 40 nm
You-Yi Chen;Chin-Cheng Chung;Jen-Hao Wen;Shao-Jung Kan;Cheng-Chung Jaing;Bing-Mau Chen;Yeuh-Yeong Liou;Yih-Shing Lee

The thickness-dependent optical and mechanical properties of the 6 nm to 40 nm W films prepared by DC magnetron sputtering at a substrate temperature of 25 degrees C were investigated with spectrophotometer, spectroscopic ellipsometer, and phase-shifting Fizeau interferometer, respectively.

  Preview abstract
Manuscript ID.  0698
Paper No.  2020-SAT-P1002-P024
Lin Zhe-Wei
Properties of Al-Doped Sn𝐎𝟐 Thin Films Prepared by Pulsed Laser Deposition
Lin Zih Jie;Lin Zhe-Wei;Liu kai-Yu;W.K. Hung

Al doped Sn𝑂2 thin film grows on c-plane sapphire using pulsed laser deposition. We changed the parameters such as substrate temperature, oxygen pressure, oxygen pressure of annealing, and time of annealing. The structural, electrical and optical properties of the samples were measured. This study used XRD, Hall measurement, penetration spectrum.

  Preview abstract
Manuscript ID.  0407
Paper No.  2020-SAT-P1002-P025
Rong-Hwei Yeh
Effects of deposition temperature, power, pressure and hydrogen content of Ga-doped ZnO film by using DC magnetron sputtering
Rong-Hwei Yeh;Xin-Li Yang

GZO thin films were prepared on a glass substrate by DC magnetron sputtering with H2 at various deposition temperatures, DC powers, working pressures, and H2 contents in the sputtering gas.

  Preview abstract
Manuscript ID.  0670
Paper No.  2020-SAT-P1002-P026
Cheng-Chung Jaing
Optical and Mechanical Properties of Sputtered Molybdenum Thin Films from 5 nm to 50 nm
Shi-Chun Zhou;Shu-Jung Chung;Jui-Hung Wang;Lin-Chun Huang;Cheng-Chung Jaing;Bing-Mau Chen;Yeuh-Yeong Liou;Yih-Shing Lee

The thickness-dependent optical and mechanical properties of Mo films from 5 nm to 50 nm prepared by DC magnetron sputtering at a substrate temperature of 25 degrees C were investigated with spectrophotometer, spectroscopic ellipsometer, and phase-shifting Fizeau interferometer, respectively.

  Preview abstract
Manuscript ID.  0068
Paper No.  2020-SAT-P1002-P027
Hossam E. Attia
SnS/g-C3N4 Nanostructured Films for Photocatalytic Conversion of CO2 into Solar Fuels
Hossam E. Attia;Hyeonseok Lee

Owing to the shortcomings of graphitic carbon nitride, nanostructured tin (II) sulfide was sculptured via physical vapor deposition to overcome the inherent limitations of graphitic carbon nitride, such as fast charge recombination rate and narrow absorption spectrum. Here we fabricated SnS/g-C3N4 nanostructured films for photoconversion of CO2 into solar fuels.

  Preview abstract
Manuscript ID.  0179
Paper No.  2020-SAT-P1002-P028
Ting-Kai Su
Fabrication of P-type Nanostructure Biosensor Applied for Photoelectrochemical and Impedance Detection of Cancer Cells
Ting-Kai Su;Chuan-Han KUung;Hsiang-Chen Wang

In this study, we fabricated the ITO photoelectrochemical biosensors which surface of materials with P-type. We will use this component to detect and analyze the degree of carcinogenesis of Pleural effusion cell carcinoma.

  Preview abstract
Manuscript ID.  0652
Paper No.  2020-SAT-P1002-P029
Jhu En Liou
Real-time Monitoring of OLED Thin Film Evaporation Process by Using a Phase Modulated Ellipsometer
Jhu En Liou;Shih Hsiang Lai;Shih Chin Lin;Chien Yuan Han

We have developed a real-time phase-modulated ellipsometric system to determine the optical characteristics. In this work, we integrated this system with a conventional evaporation machine to monitor film thickness within dozens of nanometers of OLED material during the evaporation process.

  Preview abstract
Manuscript ID.  0758
Paper No.  2020-SAT-P1002-P030
Lin Hong Lin
The electrical properties of Al-doped ZnO thin films after NH3 annealing
Lin Hong Lin

In this study, we prepare Al-doped ZnO films by ultrasonic spray pyrolysis and annealed under NH3 ambient to investigate the electrical properties after annealing, Hall measurement showed that the conductivity was converted to p-type after annealed at 500°C under 700 torr NH3

  Preview abstract
Manuscript ID.  0187
Paper No.  2020-SAT-P1002-P031
Hong-Yu Zhang
The Performance Evaluation of Fresnel solar concentrator
Hong-Yu Zhang;Bing-Mau Chen;Shang-Ping Ying

The optical simulation is used to investigate the performance of the Fresnel solar concentrator illuminated by sun with its position in the sky at any time of day. The performance of the Fresnel solar concentrator with different distance between Fresnel lens and PV cell is also carried out.

  Preview abstract
Manuscript ID.  0278
Paper No.  2020-SAT-P1002-P032
Jui-Fu Tang
XPS Investigation of Monoatomic and Tunable Argon Gas Cluster Ion Beams on Variety Materials
Jui-Fu Tang;Pei-Chi Hsu;Zi-Yun Fong;Yi-Sheng Tsai;Wei-Chun Lin;Hsun-Yun Chang

Gas cluster ion beam (GCIB) with small cluster size is considered one of the methods with the advantages of both monoatomic ion beam and conventional large cluster GCIB (Ar>2000+). In this work, XPS system was equipped with a GCIB and cluster measurement kit to investigate diverse materials.

  Preview abstract
Manuscript ID.  0700
Paper No.  2020-SAT-P1002-P033
Li Guan Li
The effect of annealing in NH3 atmosphere on the electrical properties of Ag-doped ZnO thin films
Li Guan Li;Wang Yao Te

This experiment investigates the influence of annealing under NH3 ambient on the electrical properties of Ag-doped ZnO thin films. According to the hall measurements, Ag- doped ZnO thin films obtained higher carrier concentration after NH3 annealing. It maintained the p-type behavior and the hole concentration increased to 1.087x1017cm-3 from 2.696x1016cm-3.

  Preview abstract
Manuscript ID.  0134
Paper No.  2020-SAT-P1002-P034
Yen-Chung Wang
Analyzing inertia movement error of open loop piezoelectric actuator by warming-up

In this study, the open loop piezoelectric actuator contains the special inertia movement and the serious movement error. This study develops the dynamics formulas, the improved scanning path, and the sufficient warming-up movement to reduce the error. From the experiment, the error reduces to 10% from 1.2%.

Manuscript ID.  0388
Paper No.  2020-SAT-P1002-P035
Fan Yung Hu
Bipolar switching properties of MgO-based memory device by RF sputtering
Fan Yung Hu;Wu Zhen Hui;Yang Chih Chiang;Huang Chien Sheng;Su Yan Kuin

MgO-based Resistive Random Access Memory (RRAM) devices with the bottom electrode is ITO/glass substrate, and the pattern top Al electrode was investigated. It was found the resistive switching properties exhibited the bipolar behavior, in-cluded two order on/off ratio under the reading voltage 0.1V after the endurance cycles (~200).

Manuscript ID.  0017
Paper No.  2020-SAT-P1002-P036
Chiu-Man Jiang
Simulation-Based Omnidirectional Blue Light Bragg Reflector Design by Multi-Central Wavelength Method Using Nb2O5/SiO2 Stacks
Chiu-Man Jiang;Yen-Chi Huang;Cheng-Yen Chen;Cheng-Jia Gong;Chung-Chieh Liao;Ching-Hsuan Shih;Jing-Jenn Lin

The reflectivity of Bragg reflector actually changes with the incident angle of light. In this work, measured optical parameters of Nb2O5 and SiO2 deposited by e-beam evaporation were used to simulate for the optimal design parameters of omnidirectional blue light Bragg reflector. The simulator was written in MATLAB programming language.

  Preview abstract
Manuscript ID.  0016
Paper No.  2020-SAT-P1002-P037
Po-Hung Yu
A Simulation Study on Electron-Beam Evaporated Nb2O5/MgF2 Bilayers for Omnidirectional Reflection of Blue-Light Bragg Reflector Applications
Po-Hung Yu;Hong-Zhe Jhou;Yun-Hen Wu;Yu-Yun Wu;Jing-Jenn Lin

This paper simulates the optimal parameters for an omnidirectional blue-light Bragg reflector design by adjusting the thickness ratio of materials of Nb2O5 and MgF2 at a fixed thickness of 1/4 wavelength for a single bilayer. Simulation results showed that the blue light at various incident angles maintained reflectance above 95%.

  Preview abstract