Session Index

Thin-Film Technology and Optical Engineering

Poster Session I
Friday, Dec. 4, 2020  15:40-17:30
Presider: Prof. Sheng-Hui Chen
Room: 6AB Courtyard
Manuscript ID.  0159
Paper No.  2020-FRI-P1001-P001
Yu Ying Hsu
Award Candidate
Improved design and fabrication of a novel dual-stripe micro opto-mechanical resonator for application in the broadband laser interferometer gravitational wave detector
Yu Ying Hsu;Make Ying;Huang Wei Pan;Shiuh Chao

In this study, we design and fabricate a micro-resonator "cat-flap" suspended in an optical cavity as a negative dispersion filter with sub-millimeter scale micromirrors supported by nanometer-thickness flexures. Our goal is to use the ANSYS simulation to optimize the cat-flap and develop fabrication process to increase the quality factor.

Manuscript ID.  0226
Paper No.  2020-FRI-P1001-P002
Ying-Chou Lu
Award Candidate
High-Quality and Transparent VO2 Nanoparticle Films with Excellent Solar Modulation Efficiency
Ying-Chou Lu;Chun-Hway Hsueh

The transparent VO2 nanoparticle film (Tlum = 93.3%) with the excellent solar modulation (ΔTsol = 6.1%) was successfully fabricated on the quartz substrate which improves the drawback of the VO2 film with brownish-yellow color. Its thermochromic property is expected to be a promising material for smart window applications.

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Manuscript ID.  0055
Paper No.  2020-FRI-P1001-P003
Ann-Kuo Chu
Award Candidate
Silicon surface passivation using supercritical CO2 fluid
Ke-Liang Lin;Kung-Hung Wang;Wei-Chen Tien;Ann-Kuo Chu

A novel silicon surface passivation technique using supercritical CO2 fluid with oxidant (H2O2) is proposed. The treated double-sided Si surfaces were further passivated by depositing a thin n-type poly-Si layer using VHF-PECVD system. The carrier lifetime of the silicon surface after the passivation of the poly-Si/SiOx stack is 1.23 ms.

Manuscript ID.  0130
Paper No.  2020-FRI-P1001-P004
Yu-Hsuan Hsu
Award Candidate
Development of Transparent Conductive of ZnO/Ag/ZnO Multilayers for Flexible Device Applications
Yu-Hsuan Hsu;Sood Apoorva;Wan-Yu Wu;Ray-Hua Horng

The transparent conductive ZnO/Ag/ZnO multilayers were deposited on flexible PI substrate by HiPIMS in low temperature without additional heating. An excellent transparent in visible wavelength and lowest resistivity were obtained in 88% and 5.5x10-5 Ωcm, respectively. The performance of vertical LED was compared before and after bonding using the multilayers.

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Manuscript ID.  0323
Paper No.  2020-FRI-P1001-P005
YeHsin Ko
Award Candidate
Resistive Random Access Memory Based On Inorganic Halide Perovskite
YeHsin Ko;YouSyuan Chen;ChihChiang Yang;YanKuin Su

All-inorganic perovskite has been widely used in various fields such as light emitting diode, solar cells, and memory devices. In this work, the resistive switching memory with a structure of ITO/CsPbBr3/Au showed typical bipolar resistive switching characteristic with high ON/OFF ratio (>103) , large repeat cycle(>200).

Manuscript ID.  0729
Paper No.  2020-FRI-P1001-P006
Shu- Hui Su
Award Candidate
Thin Film Based Fiber-Optic Sensors for Detecting Temperature and Relative Humidity
Chuen-Lin Tien;Ting-Yi Wang;Shu- Hui Su

Lossy mode resonance effect combined with D-shaped multimode fiber was used to fabricate a temperature and humidity fiber sensor. The sensitivity of the temperature sensor is 1.2 nm/°C in the range of 30 to 60°C. The relative humidity sensitivity is 1.0 nm/RH% in the relative range of RH30% to RH60%.

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Manuscript ID.  0348
Paper No.  2020-FRI-P1001-P007
Yan-Hao Wang
Award Candidate
High Performance Solution Processed Light Emitting Diodes by Doping Polymer Luminescent Material based on Quantum Dot
Yan-Hao Wang;Hsin-Yu Pan;Jia-Zhen Li;Chih-Chiang Yang;Yan-Kuin Su;Hoang-Tuan Vu

The polymer luminescent materials Poly(9-vinylcarbazole) are doped in quantum dot light emitting diode which let the excess electrons form excitons with the injected holes from the hole transport layer, and the performance is enhanced by Förster resonance energy transfer. The maximum of luminance and efficiency reached to 69055cd/m2 and 6.5cd/A.

Manuscript ID.  0526
Paper No.  2020-FRI-P1001-P008
Chien Chao
Award Candidate
The Effect of Oxygen Annealing Treatment for Amorphous Aluminum Indium Zin Tin Oxide Thin Film Transistors
Chien Chao;Ya-Han Li;Tsung-Che Chiang;Yi-Ru Shih;Zhen-Hao Li;Po-Tsun Liu

In this work, we present that by moderating AIZTO TFTs by annealing at different temperatures and annealing time, the electrical performance enhanced. Annealing with oxygen gas atmosphere could eliminate the oxygen vacancy in the channel and suppress the leakage current phenomenon. These advantages allow it to develop next-generation display.

Manuscript ID.  0793
Paper No.  2020-FRI-P1001-P009
Chun-Hao Hsieh
Award Candidate
Fabrication of Soil Moisture Sensor by Side-Polished Fiber and SnO2 Thin Film
Chun-Hao Hsieh;Chuen-Lin Tien;Pin-Jyun Hou;Yi-Sheng Li

We proposed a soil moisture sensor using fiber side-polishing and RF magnetron sputtering techniques. Tin oxide film was coated on the D-shaped multi-mode fibers to make a high sensitivity fiber sensor. Lossy mode resonance effect was used to detect the soil moisture. The sensitivity of 2.15 nm/RH% was achieved.

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Manuscript ID.  0476
Paper No.  2020-FRI-P1001-P010
Ya-Chu Lee
A TFT Biosensor Integrated With a Microfluidic Channel for Real-Time Monitoring Biochemical Reactions
Ya-Chu Lee;Jian-Jang Huang;Yao-Hsuan Lai;Jin-Chun Lim

In this work, the metal-oxide TFT (thin-film transistor) biosensor integrated with a microfluidic channel was developed to investigate biochemical reaction kinetics. Using the malate-aspartate shuttle as an example, we established the correlation between the molecular diffusion behaviors in the microfluidic channel and the TFT current responses.

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Manuscript ID.  0509
Paper No.  2020-FRI-P1001-P011
Sheng-Po Chang
An Amorphous (Al0.12Ga0.88)2O3 Deep UV Photodetector
Shu-Bai Liu;Shoou-Jinn Chang;Sheng-Po Chang;Wei-Chih Lai

The authors report the deposition of an (AlxGa1-x)2O3 amorphous thin film on sapphire substrates by sputter deposition. An amorphous deep UV (Al0.12Ga0.88)2O3 photodetector, with a cutoff wavelength at 230 nm, was also fabricated.

Manuscript ID.  0714
Paper No.  2020-FRI-P1001-P012
Teh-Li Chan
Obliquely bideposited silver nano-zigzag arrays for SERS application
Yi-Jun Jen;Teh-Li Chan;Ming-Yang Cong;Wei-Chen Liu

Obliquely bideposition was used to deposit silver nano-zigzag arrays with different sizes. When the nano-zigzag array was illuminated with electromagnetic wave, electrical field was enhanced around the corners of the zigzag. The hot spots are found to support the SERS signals in measurement.

Manuscript ID.  0172
Paper No.  2020-FRI-P1001-P013
Szu Wei Wu
Encapsulation technology of flexible Micro LED
Szu Wei Wu

A highly reliable encapsulation method was developed for flexible Micro LED. The technology implemented on flexible TEG was loaded on testing module with a folding radius of 5 mm.

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Manuscript ID.  0573
Paper No.  2020-FRI-P1001-P014
Shih-Chun Hsu
Non-contact Hydrochloric Acid Concentration Measurement Using a Birefringent Polymer Transducer in Heterodyne Interferometer
Ruey-Ching Twu Twu;Kai-Hsuan Li;Shih-Chun Hsu;Shu-Quan Qiu

A birefringent polymer transducer was used for the hydrochloric acid concentration measurements in a common path heterodyne interferometer. The achievable measurement resolutions of RI and concentration are 6.94×10-6 RIU and 16.7 ppm, respectively.

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Manuscript ID.  0715
Paper No.  2020-FRI-P1001-P015
Yen-Yin Feng
Tamm plasmon wave excited between a silver nanoparticle array and all-dielectric Bragg mirror
Yi-Jun Jen;Bo-huei Liao;Wei-Chen Liu;Yen-Yin Feng;Wei-Chieh Ma

In this work, glancing angle deposition was applied to deposit an ultra-thin nanoparticle array on a Bragg mirror. The transmission spectrum shows that the Tamm plasmon wave was excited at a wavelength of 578 nm. It is demonstrated that a surface wave has been excited underneath the nanoparticles.

Manuscript ID.  0445
Paper No.  2020-FRI-P1001-P016
Chieh Chou
Effect of thermal annealing on the structural and transport properties of Bismuth thin films
Yu Xiao;Chieh Chou;Hao-Hsiung Lin

We investigate the effect of thermal annealing on the structural and electrical properties of 80-nm-thick Bismuth (Bi) thin films with grains. The thermal process brings Bi thin film greater magnetoresistance ratio (MR) and carrier mobilities due to improved material crystallinity.

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Manuscript ID.  0456
Paper No.  2020-FRI-P1001-P017
Yu-Hsing Lin
A comparative study of optical properties and surface roughness of AlOxNy Film deposited by HiPIMS and DOMS
Yu-Hsing Lin;Chang-Ze Hong;Chien-Jen Tang

Aluminum oxynitride films were prepared by high power impulse magnetron sputtering and deep oscillation magnetron sputtering. The influence of processes on crystalline structures, optical properties and surface roughness of films were investigated by spectroscopic elliposmeter and UV-VIS-NIR spectrometer.

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Manuscript ID.  0637
Paper No.  2020-FRI-P1001-P018
Jian-Yu Li
Influence of Optical Properties of Thermochromic W-doped VO2 Films deposited by High Power Impulse Magnetron Sputtering
Jian-Yu Li;Ching-Tang Li;Chang-Ze Hong;Chien-Jen Tang

Thermochromic VO2 and W-VO2 films were prepared by HiPIMS with substrate temperature at 300 °C. The transition temperature of VO2 and W-VO2 films were 68 °C and 46 °C, respectively. The thermochromic properties and optical constants of VO2 and W-VO2 were analyzed by spectrometer and ellipsometer.

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Manuscript ID.  0643
Paper No.  2020-FRI-P1001-P019
Tzu-Ning Cheng
Farnsworth D-15 color-blindness test by wearing an optical notch filter
Tzu-Ning Cheng;Jin-Cherng Hsu

We have studied the color discriminations of human test experiments before and after wearing a notch filter, which has a 20 nm full-width at half maximum (FWHM), 8.5% low transmittance at the reference wavelength of 580 nm.

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Manuscript ID.  0745
Paper No.  2020-FRI-P1001-P020
Thanh Duy Cu
Analysing the morphology of anti-glare coatings for low sparkle
Thanh Duy Cu;Chien-Cheng Kuo

Anti-glare coatings for electronic device screens with low sparkle were prepared via the sol-gel process using spray methods. Simulation was used to predict the influence of the surface morphology on the sparkle value. The sparkle value was optimized at the appropriate diameter.

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Manuscript ID.  0095
Paper No.  2020-FRI-P1001-P021
Hao-Yuan Lin
High Dynamic Range Optimization for Metal Surface Phase-Shift Measurement
Hao-Yuan Lin;Ju-Yi Lee;Bing-Lin Ho

In terms of 3-D scanning, the most difficult thing to overcome is to scan metal objects. High Dynamic Range (HDR) is a suitable way to solve this problem. The main purpose of this paper is to optimize HDR by automatically calculation of the best exposure time.

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Manuscript ID.  0127
Paper No.  2020-FRI-P1001-P022
Lee Meng-Lin
Effects of Different Purification Solvents on The Properties of Perovskite CsPbBr3 Quantum Dots
Lee Meng-Lin

We present a simple proprietary purification system for the synthesis of high-quality perovskite CsPbBr3 quantum dots with high photoluminescence quantum yield by introducing purification solvents, that is, ethyl acetate, ethyl acetate:hexane, acetone, acetone:hexane into a crude solution. Optimal material and light characteristics were exhibited with the ethyl acetate:hexane purification solvent.

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Manuscript ID.  0462
Paper No.  2020-FRI-P1001-P023
Shan Yeh
The Time Response for the Low Temperature Poly-Silicon Thin-Film Transistors to the X-ray Irradiation Pulse
Ya-Hsiang Tai;Shan Yeh;Wei-Lin Chen

The time response behavior of low-temperature polycrystalline silicon (LTPS) thin-film transistors (TFTs) to the X-ray irradiation pulse with different frequencies is analyzed. The formulas for excited and recovering behaviors are proposed to be possibly used for the circuit performance in real situation. The predicted and measured results fit fairly well.

Manuscript ID.  0665
Paper No.  2020-FRI-P1001-P024
Ming-Fu Liu
Characteristics of Calcium Ion Sensor Based on Hydrogen-Bonded Cholesterol Type Liquid Crystal
Ming-Fu Liu;Bo-Xiang Peng;Jen-Wei Hung;Shug-June Hwang

A hydrogen-bonded polymer cholesteric liquid crystal (PCLC) is proposed as a metal sensor. Calcium ion makes the crosslinking degree of the PCLC increase and then causes the PCLC pitch shrink and its reflected wavelength blue-shift. The sensing performance is studied by measuring the wavelength shift induced by metal ion.

Manuscript ID.  0158
Paper No.  2020-FRI-P1001-P025
Ting-Wei Hsu
The Enhancement of Light Harvesting using Leaf Structures Surface on Thin-Film Luminescent Solar Concentrators
Ting-Wei Hsu;Bing-Mau Chen;Shang-Ping Ying

In this study, the leaf-structures are patterned onto thin-film LSCs using inorganic phosphor .It is found that the efficiencies of thin film LSCs covered with replica layers of Bauhinia and Epipremnum aureum are higher than the one with flat encapsulation layer.

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Manuscript ID.  0347
Paper No.  2020-FRI-P1001-P026
Yun-Ting Tsai
TiO2 Nanostructures Applied On Non-Enzyme Glucose Sensor
Yun-Ting Tsai;Jhih-Yuan Jhu;Chih-Chiang Yang;Yan-Kuin Su

Nowadays, the applications of nanostructure have increased. Because of the characteristics of the stable chemical structure and photoelectric properties, TiO2 are often used in our life. In this study, TiO2 nanostructures were prepared by hydrothermal method and the non-enzymatic glucose sensor has high sensitivity (37.31𝜇A𝑐𝑚−2/m𝑀).

Manuscript ID.  0433
Paper No.  2020-FRI-P1001-P027
Yu-Hung Yen
Optical Modulation and Cycle Stability of All-Solid-State ITO/WO3/Li-NbO3/NiO/ITO Device Deposited with Magnetron Sputtering
Yu-Hung Yen;Kun-Hong Chen;Hsi-Chao Chen;Yu-Xuan Zhuang;Xin-Ya Zheng

Nickel oxide (NiO) was used as an auxiliary color-changing layer for an all-solid-state ITO/WO3/Li-NbO3/NiO/ITO device deposited with magnetron sputtering. NiO film was deposited at different oxygen flow rates from 4-10 sccm. When the oxygen flow rate is 4 sccm, the optical modulation at a wavelength of 550 nm is 53.4%.

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Manuscript ID.  0699
Paper No.  2020-FRI-P1001-P028
Shao-Pu Wu
Porous Polydimethylsiloxane Elastomeric Dielectric for Wide-Range Capacitive Pressure Sensing
Shao-Pu Wu;Gen-Wen Hsieh;Liang-Cheng Shih

We report a flexible capacitive pressure sensor based on a porous dielectric film of polydimethylsiloxane for wide-range pressure sensing. A 2-propanol aqueous solution is employed as the porogen for the formation of porous microstructures with controlled size. Improved pressure sensing performance and the capability for different stimuli are discussed.

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Manuscript ID.  0627
Paper No.  2020-FRI-P1001-P029
Hsing-Yu Wu
The improvement of automatic precision process to generate high quality lightweight spaceborne mirrors
Hsing-Yu Wu;Li-Chih Hu;Wei-Che Chang;Yung-Hsien Liu;Po-Hsuan Huang;Yi-Kai Huang

To meet the missions of earth observation in the next decade, optical remote sensing systems require totally 8 optical satellites. Among these, more than 24 lightweight spaceborne mirrors will be fabricated on schedule. This paper reports the development in automation for the rapid, cost-effective, and high quality light-weighted processing process.

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Manuscript ID.  0636
Paper No.  2020-FRI-P1001-P030
Yu-Jen Hsu
Patterning of Fused Silica Surface by CO2 Laser and Their Microstructure Characterizations
Yu-Jen Hsu;Hsing-Yu Wu;Wei-Che Chang;Yung-Tang Nien

Fused silica was patterned by a continuous CO2 laser with an energy density of 0.24 J/mm2, presenting agglomerated nanoparticles of <100 nm in the groove of around 20 μm deep and 153 μm wide. Chemical analysis indicated the removal of silicon-related impurities in laser processing, inducing more purified silica surface.

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Manuscript ID.  0744
Paper No.  2020-FRI-P1001-P031
Yan He Liu
Optical properties of ITO/ Nb doping TiO2 double layer thin films deposited by sputtering
Yih-Shing Lee;Yan He Liu;Cheng-jia Tang

The results of experimental ITO/TNO double layers, the thickness combination with 70/30 nm has the lowest the average reflectance, which was reduced by 2.3% and the experimental result showed the same trend with the simulated results.

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Manuscript ID.  0757
Paper No.  2020-FRI-P1001-P032
Analyzing Adhesion and Crack of Antireflection Coating on Plastic Substrates by Plasma-Assisted Atomic Layer Deposition
HE YE-YO;Liu Tzu-Fan;Kuo Chien-Cheng

Plasma-assisted atomic layer deposition was used in this experiment. The antireflection (AR) film was coated on the plastic substrate to test the adhesion and film crack. The optimized parameters were found for coating on the curved-surface micro lens. The reflectivity and uniformity of each point were measured by optical microscope.

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Manuscript ID.  0343
Paper No.  2020-FRI-P1001-P033
Wei-Hsiang Chen
The Fabrication of a White Light Blinded Al/TiO2/Si MIS Photo-detector With UV Enhanced Photo Responsivity
Ming Chang Shih;Wei-Hsiang Chen;Chi-Bin Weng

We demonstrate the fabrication of a Si based metal insulator semiconductor (MIS) photo-detector of the Al/TiO2/Si structure and its characteristics of photo-responsivity. White light blinded enhancement of photo responsivity around UV can be effectively achieved by simply tuning the TiO2 thickness.

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Manuscript ID.  0554
Paper No.  2020-FRI-P1001-P034
Chuen-Lin Tien
The Coefficient of Thermal Expansion and Thermal Stress in SiO2(Ge/SiO2)11 Multilayer Thin Films
Chuen-Lin Tien;Hung-Ching Pai;Hong-Yi Lin

The mid-infrared bandpass filter of SiO2(Ge/SiO2)11 multilayer films was fabricated by electron beam evaporation with ion assisted deposition. Residual thermal stress and thermal expansion coefficient of the mid-infrared bandpass filter was measured by an optical interferometer with heating temperature range of 20-100℃.

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Manuscript ID.  0701
Paper No.  2020-FRI-P1001-P035
Huang Yu Sheng
The electrical properties of In-doped ZnO thin films annealed under NH3 ambient
Huang Yu Sheng;Wang Yao Te

In this work, In-doped ZnO thin films were prepared by ultrasonic spray pyrolysis, then annealed in NH3 at temperature of 500°C for 30 minutes. The highest In-doped ZnO thin films were converted into p-type semiconductors, with the highest hole concentration of 2.4×1019 cm-3 and the lowest resistivity of 0.19 Ω-cm.

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Manuscript ID.  0722
Paper No.  2020-FRI-P1001-P036
Sui-Hua Wu
Use of DC reactive magnetron sputtering to grow high-quality AlN on Si<111> substrate
Sui-Hua Wu;Wei-Sheng Liu;Yu-Lun Jiang;Chung-Kai Chi

A high-quality AlN film was grown using DC magnetron sputtering technology with a Al intermediate film deposited pre-sputtering on a Si <111> substrate at 300 °C. We observed that the film crystal orientation was AlN<100> and the surface roughness of the aluminium-containing film was better than that without aluminium.

Manuscript ID.  0049
Paper No.  2020-FRI-P1001-P037
Pei-Ying Chen
Effect of Smartphone Settings on Screen Viewing Safety
Pei-Ying Chen;En-Le Su;Min-Chi Hsieh;Pin-Jen Chen;Jin-Ting Lin;Ming-Li Chou;Po-Ting Yeh;Jwo-Huei Jou

We use three smartphones to study how three features, i.e. blue light filter mode, brightness adjustment, and dark mode, affect viewing safety. Amongst, adjusting brightness is the most effective, which can increase the viewing time by 20 to 48% while adopting blue light filter mode is the least effective.

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